Instrument data output for Fig. 7 in:

Three-dimensional interferometric stage encoder using a single access port
K.B.Wiseman et al., 2020

Description:
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Sample of displacement data (a) for a triangular stage motion in the X direction. Also included is calculated displacement amplitude spectral densities for similar motions in each stage motion axes at two distinct stage motion velocities.
The first motions occur with 50um/s stage motion velocity, the second stage motions occur at 70um/s stage motion velocity.

Data files:
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Sample_Displacement.csv
	Column 1:   Timebase [s]
	Column 2:   Interferogram amplitude [a.u.]
	Column 3:   Window Amplitude [a.u.] (Secondary Axis)
First_Motion.csv:
	Column 1:   Frequencies [Hz]
	Column 2:   X displacement amplitude [um]
	Column 3:   Y displacement amplitude [um]
	Column 4:   Z displacement amplitude [um]
Second_Motion.csv:
	Column 1:   Frequencies [Hz]
	Column 2:   X displacement amplitude [um]
	Column 3:   Y displacement amplitude [um]
	Column 4:   Z displacement amplitude [um]



