Instrument data output for Fig. 5 in:

Three-dimensional interferometric stage encoder using a single access port
K.B.Wiseman et al., 2020

Description:
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Measured displacement data for triangular motions of the stage in each direction, for comparison of the interferometric encoder with the in-built stage strain encoder.
The residual graphs, (b), (d) & (f) are the difference between the stage encoder data and the interferometric encoder data in each case
The inset data shown in figures (a), (c) & (e) is directly extracted from the relevant stage and interferometric encoder data

Data files:
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X_motion.csv:
	Column 1:   Timebase [s]
	Column 2:   Stage Encoder Measurement [um]
	Column 3:   Interferometric Encoder Measurement [um]
Y_motion.csv:
	Column 1:   Timebase [s]
	Column 2:   Stage Encoder Measurement [um]
	Column 3:   Interferometric Encoder Measurement [um]
Z_motion.csv:
	Column 1:   Timebase [s]
	Column 2:   Stage Encoder Measurement [um]
	Column 3:   Interferometric Encoder Measurement [um]