Instrument data output for Fig. 8 in:

Three-dimensional interferometric stage encoder using a single access port
K.B.Wiseman et al., 2020

Description:
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Displacement measurements for helical motions, consisting of circular motions in a selected plane and linear motion in a third orthogonal dimension.
(a) represents a linear Z motion with circular motion in the X-Y plane
(c) represents a linear X motion with circular motion in the Y-Z plane
(e) represents a linear Y motion with circular motion in the X-Z plane



Data files:
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Linear_Z_Helix:
	Column 1:   X Displacement [um]
	Column 2:   Y Displacement [um]
	Column 3:   Z Displacement [um]
Linear_X_Helix:
	Column 1:   X Displacement [um]
	Column 2:   Y Displacement [um]
	Column 3:   Z Displacement [um]
Linear_Y_Helix:
	Column 1:   X Displacement [um]
	Column 2:   Y Displacement [um]
	Column 3:   Z Displacement [um]