Instrument data output for Fig. 6 in:

Three-dimensional interferometric stage encoder using a single access port
K.B.Wiseman et al., 2020

Description:
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A sample of displacement data (a) for a sinesoidal stage motion in the X direction used to calculate the Displacement Amplitude Spectral Density shown in (b)


Data files:
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Sample Displacement.csv:
	Column 1:   Timebase [s]
	Column 2:   X displacement measurement [um]
	Column 3:   Y displacement measurement [um]
	Column 4:   Z displacement measurement [um]
DASD.csv:
	Column 1:   Frequencies [Hz]
	Column 2:   X displacement amplitude [um]
	Column 3:   Y displacement amplitude [um]
	Column 4:   Z displacement amplitude [um]
	Column 5:   Interferometer Alpha amplitude [um]
