Browsing by Author "Fox, Colin H. J."

Now showing 1 - 1 of 1
  • Thumbnail Image
    ItemOpen Access
    In-plane excitation of thin silicon cantilevers using piezoelectric thin films
    (American Institute of Physics, 2007-10) Leighton, Glenn J. T.; Kirby, Paul B.; Fox, Colin H. J.
    This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.