Shaw, Christopher P.Landi, SpartacoWhatmore, Roger W.Kirby, Paul B.2007-05-222007-05-222004Shaw C, Landi S, Whatmore R, Kirby P. (2004) Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors. Integrated Ferroelectrics, Volume 63, Issue 1, pp. 93-971058-4587http://hdl.handle.net/1826/1695http://dx.doi.org/10.1080/10584580490458775Abstract Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.97672 bytesapplication/pdfenPyroelectric arraymicromachiningcorona polingArticle