Tonnellier, XavierMorantz, PaulShore, PaulBaldwin, A.Evans, R.Walker, D. D.2012-01-062012-01-062007-09-17X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D. D. Walker, Subsurface damage in precision ground ULE® and Zerodur® surfaces, Optics Express, Volume 15, Issue 19, 2007, Pages 12197-12205.1094-4087http://dx.doi.org/10.1364/OE.15.012197http://dspace.lib.cranfield.ac.uk/handle/1826/6835The total process cycle time for large ULE®and Zerodur®optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE®and Zerodur®surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: ‘process’ and ‘machine dynamicsThis paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/abstract.cfm?URI=oe-15-19-12197. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.Article