Duval, Fabrice F. C.Wilson, Stephen A.Ensell, GrahamEvanno, Nicolas M. P.Cain, Markys G.Whatmore, Roger W.2007-09-032007-09-032007-01-08Duval FFC, Wilson SA, Ensell G, et al., (2007) Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor. Sensors and Actuators A: Physical, Volume 133, Issue 1, January 2007, pp 35-440924-4247https://doi.org/10.1016/j.sna.2006.03.035http://hdl.handle.net/1826/1854This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 μm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.186234 bytesapplication/pdfenPZTCantileversVibrometryForce sensorsBlocking forceArticle