Wiseman, KieranKissinger, ThomasTatam, Ralph2024-06-112024-06-112020-09-03Wiseman, Kieran; Kissinger, Thomas; Tatam, Ralph (2020). Three-dimensional interferometric stage encoder using a single access port. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.11777853https://dspace.lib.cranfield.ac.uk/handle/1826/22405Research Data for Paper "Three-dimensional interferometric stage encoder using a single access port" by Kieran B. Wiseman, Thomas Kissinger and Ralph P. Tatam, Cranfield University, UKCC BY 4.0https://creativecommons.org/licenses/by/4.0/interferometric technique''interferometric measurements''Optical Encoding''metrology applications''metrology technique''PhotonicsOptoelectronics and Optical Communications''Nanometrology'Dataset10.17862/cranfield.rd.11777853