Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors
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Shaw, Christopher P.
Landi, Spartaco
Whatmore, Roger W.
Kirby, Paul B.
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1058-4587
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Shaw C, Landi S, Whatmore R, Kirby P. (2004) Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors. Integrated Ferroelectrics, Volume 63, Issue 1, pp. 93-97
Abstract
Abstract Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.
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Github
Keywords
Pyroelectric array, micromachining, corona poling