In-plane excitation of thin silicon cantilevers using piezoelectric thin films
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Leighton, Glenn J. T.
Kirby, Paul B.
Fox, Colin H. J.
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0003-6951
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Leighton GJT, Kirby PB, Fox CHJ. (2007) In-plane excitation of thin silicon cantilevers using piezoelectric thin films. Applied Physics Letters, October 2007, Volume 91, Issue 18, pp. 183510-183510-3
Abstract
This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.