Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data
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Authors
Bridges, Angus
Yacoot, Andrew
Kissinger, Thomas
Tatam, Ralph
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Bridges, Angus; Yacoot, Andrew; Kissinger, Thomas; Tatam, Ralph (2021). Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.16460430
Abstract
Data associated with the publication "Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities".
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Github
Keywords
Interferometry', 'Non-linearity', 'Dimensional Metrology', 'Optical Physics not elsewhere classified', 'Nanometrology'
DOI
10.17862/cranfield.rd.16460430
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CC BY 4.0
Funder/s
Optical metrology to support the next generation of nanopositioning