Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data
Loading...
Date published
Free to read from
Supervisor/s
Industry supervisor/s
Journal Title
Journal ISSN
Volume Title
Publisher
Department
Course name
Type
ISSN
Format
Citation
Bridges, Angus; Yacoot, Andrew; Kissinger, Thomas; Tatam, Ralph (2021). Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.16460430
Abstract
Data associated with the publication "Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities".
Description
Software description
Software language
Git repository
Keywords
Interferometry', 'Non-linearity', 'Dimensional Metrology', 'Optical Physics not elsewhere classified', 'Nanometrology'
DOI
10.17862/cranfield.rd.16460430
Rights
CC BY 4.0
Funder/s
Optical metrology to support the next generation of nanopositioning