Thick-film piezoelectric bimorph actuators for MEMS devices

Abstract

Active ow control can be used to improve the aerodynamic e ciency of passenger aircraft, road tra c and wind turbines amongst other applications. This work describes the fabrication of an ultra-compact microvalve that has been designed as part of an active aerodynamic ow control system that generates airjets of a scale and velocity that have been shown to have desirable e ects on the macroscopic air ow. The design of the microvalve is based on criteria speci ed by the requirements of active ow control and the piezoelectric bimorph actuator which opens and closes the valve outlet. Cont/d.