Three-dimensional interferometric stage encoder using a single access port
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Wiseman, Kieran; Kissinger, Thomas; Tatam, Ralph (2020). Three-dimensional interferometric stage encoder using a single access port. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.11777853
Abstract
Research Data for Paper "Three-dimensional interferometric stage encoder using a single access port" by Kieran B. Wiseman, Thomas Kissinger and Ralph P. Tatam, Cranfield University, UK
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Keywords
interferometric technique', 'interferometric measurements', 'Optical Encoding', 'metrology applications', 'metrology technique', 'Photonics, Optoelectronics and Optical Communications', 'Nanometrology'
DOI
10.17862/cranfield.rd.11777853
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CC BY 4.0
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EPSRC UK EP/N509450/1