Three-dimensional interferometric stage encoder using a single access port

dc.contributor.author	Wiseman, Kieran
dc.contributor.author	Kissinger, Thomas
dc.contributor.author	Tatam, Ralph
dc.date.accessioned	2024-06-11T09:37:51Z
dc.date.available	2024-06-11T09:37:51Z
dc.date.issued	2020-09-03 11:26
dc.description.abstract	Research Data for Paper "Three-dimensional interferometric stage encoder using a single access port" by Kieran B. Wiseman, Thomas Kissinger and Ralph P. Tatam, Cranfield University, UK
dc.description.sponsorship	EPSRC UK EP/N509450/1
dc.identifier.citation	Wiseman, Kieran; Kissinger, Thomas; Tatam, Ralph (2020). Three-dimensional interferometric stage encoder using a single access port. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.11777853
dc.identifier.doi	10.17862/cranfield.rd.11777853
dc.identifier.uri	https://dspace.lib.cranfield.ac.uk/handle/1826/22405
dc.publisher	Cranfield University
dc.rights	CC BY 4.0
dc.rights.uri	https://creativecommons.org/licenses/by/4.0/
dc.subject	interferometric technique'
dc.subject	'interferometric measurements'
dc.subject	'Optical Encoding'
dc.subject	'metrology applications'
dc.subject	'metrology technique'
dc.subject	'Photonics
dc.subject	Optoelectronics and Optical Communications'
dc.subject	'Nanometrology'
dc.title	Three-dimensional interferometric stage encoder using a single access port
dc.type	Dataset